Control techniques for electrostatic microelectromechanical (mem) structure
Disclosed are a method, device, and system for a microelectromechanical (MEM) device control system that can control the operation of a MEM device. The system can include a microelectromechanical...
View ArticleMethod of detecting mem device faults with single current pulse
A method of detecting a fault within a micro electro-mechanical device is provided. The micro electro-mechanical device has a support structure and an actuating arm that is movable relative to the...
View ArticleOptical assembly for optical communication systems
An optical assembly comprising a semiconductor chip having a handle layer and a device layer on the handle layer. The device layer comprises a focusing element, a MEM device, and one or more support...
View ArticleMiniaturized implantable sensor platform having multiple devices and sub-chips
This invention describes a hermetically sealed package which can be implanted in the body. The package comprise of stacked substrates where surface of one substrate hosts biosensors which are exposed...
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